Titanium-aluminum nitride film growth and related chemistry using dimethylamino-based precursors

Author： Endle J.P. Sun Y.-M. Silverman J. Nguyen N. H. Cowley A. White J.M. Ekerdt J.G.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.385, Iss.1, 2001-04, pp. : 66-73

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