Characterisation of aluminium oxynitride gas barrier films

Author： Erlat A.G.   Henry B.M.   Ingram J.J.   Mountain D.B.   McGuigan A.   Howson R.P.   Grovenor C.R.M.   Briggs G.A.D.   Tsukahara Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 78-86

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