Water as reactive gas to prepare titanium oxynitride thin films by reactive sputtering

Author： Chappe J.-M.   Martin N.   Terwagne G.   Lintymer J.   Gavoille J.   Takadoum J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.440, Iss.1, 2003-09, pp. : 66-73

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