Investigation of deposition rate and structure of pulse DC plasma polymers

Author: Zhang J.   van Ooij W.   France P.   Datta S.   Radomyselskiy A.   Xie H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 123-129

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract