Influence of the deposition rate on the structure of thin metal layers

Author: Haier P.   Hermann B.A.   Esser N.   Pietsch U.   Luders K.   Richter W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 223-226

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