Dissociation process of CH 4 /H 2 gas mixture during EACVD

Author: Dong L.   Chen J.   Li X.   Zhang L.   Han L.   Fu G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 93-97

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