Surface modification of spin-on-glass film by liquid-phase deposition of fluorinated silicon oxide

Author: Homma T.   Kondo H.   Inohara K.   Nomoto M.   Sakamoto M.   Ariyama Y.   Takahashi H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.392, Iss.1, 2001-07, pp. : 107-112

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Abstract