Transition from polymer-like to diamond-like carbon coatings synthesized by a hybrid radiofrequency-microwave plasma source

Author: Braca E.   Kenny J.M.   Korzec D.   Engemann J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.394, Iss.1, 2001-08, pp. : 29-38

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Abstract