Investigation of diamond-like carbon films synthesized by multi-jet hollow cathode rf plasma source

Author： Fedosenko G.   Korzec D.   Engemann J.   Lyebyedyev D.   Scheer H.-C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 275-281

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