Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition

Author: Brockhoff A.M.   van der Weg W.F.   Habraken F.H.P.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 87-91

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Abstract