Stoichiometry determination of VO x thin films by 18 O-RBS spectrometry

Author: Rata A.D.   Vongtragool S.   Boerma D.O.   Hibma T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.400, Iss.1, 2001-12, pp. : 120-124

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Abstract