Author: LeGore L.J. Lad R.J. Moulzolf S.C. Vetelino J.F. Frederick B.G. Kenik E.A.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 79-86
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Abstract
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