Multilayer TiN/Ti films for high-temperature annealing of GaAs

Author: Yokota K.   Nakamura K.   Satho M.   Takano H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 87-92

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Abstract