Detection of deposition rate of plasma-polymerized silicon-containing films by quartz crystal microbalance

Author： Kurosawa S.   Aizawa H.   Miyake J.   Yoshimoto M.   Hilborn J.   Abidin Talib Z.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 1-6

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