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Author: Sugimura H. Sato Y. Ando Y. Tajima N. Takai O.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 104-108
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Deposition of carbon nitride thin films by arc ion plating
By Takai O. Taki Y. Kitagawa T.
Thin Solid Films, Vol. 317, Iss. 1, 1998-04 ,pp. :
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