Author： Miyano R. Saito T. Takikawa H. Sakakibara T.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 221-226
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
Cathode Spots of Vacuum Arc Discharges
VAKUUM IN FORSCHUNG UND PRAXIS, Vol. 27, Iss. 2, 2015-04 ,pp. :
Effects of pressure on the cleaning action of cathode spot in low vacuum
Thin Solid Films, Vol. 407, Iss. 1, 2002-03 ,pp. :
The influence of a hot cathode vacuum gauge on the residual gas composition
By Nemanic V. Zumer M. Zajec B.
Vacuum, Vol. 70, Iss. 4, 2003-04 ,pp. :
Deposition of (Ti, Al)N films by filtered cathodic vacuum arc
By Cheng Y.H. Tay B.K. Lau S.P. Shi X. Chua H.C.
Thin Solid Films, Vol. 379, Iss. 1, 2000-12 ,pp. :