Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases

Author: Miyano R.   Saito T.   Kimura K.   Ikeda M.   Takikawa H.   Sakakibara T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 192-196

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Abstract