Preparation of Al-doped ZnO thin films by RF thermal plasma evaporation

Author： Tsujino J.   Homma N.   Sugawara T.   Shimono I.   Abe Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 86-91

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