Electrochemical evaluation of high temperature hydrogen impermeability of TiN films and its dependence on film thickness

Author: Nishikiori T.   Nohira T.   Ito Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 148-154

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Abstract