Influence of thickness and substrate on the hardness and deformation of TiN films

Author: Wittling M.   Bendavid A.   Martin P.J.   Swain M.V.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 283-288

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Abstract