Growth kinetics and structure formation of ZrO 2 thin films in chloride-based atomic layer deposition process

Author： Aarik J.   Aidla A.   Mandar H.   Uustare T.   Sammelselg V.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 97-103

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