In-situ thin film diagnostics using waveguide mode spectroscopy

Author: Jacobsen V.   Menges B.   Forch R.   Mittler S.   Knoll W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.409, Iss.2, 2002-04, pp. : 185-193

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Abstract