Influence of gate metal film growth parameters on the properties of gas sensitive field-effect devices

Author: Åbom A.E.   Persson P.   Hultman L.   Eriksson M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.409, Iss.2, 2002-04, pp. : 233-242

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