Author: Kukli K. Ritala M. Uustare T. Aarik J. Forsgren K. Sajavaara T. Leskela M. Harsta A.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.410, Iss.1, 2002-05, pp. : 53-60
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Abstract
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