Effects of postannealing in ozone environment on opto-electrical properties of Sn-doped In 2 O 3 thin films

Author: Mori N.   Ooki S.   Masubuchi N.   Tanaka A.   Kogoma M.   Ito T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.411, Iss.1, 2002-05, pp. : 6-11

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Abstract