Modeling 3D effects of substrate topography on step coverage and film morphology of thin metal films

Author: Smy T.   Dew S.K.   Joshi R.V.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 32-45

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Abstract