Phase modulated spectroscopic ellipsometry of dielectric multilayer beam combiner

Author： Bhattacharyya D.   Sahoo N.K.   Thakur S.   Das N.C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.416, Iss.1, 2002-09, pp. : 97-105

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