Nitrogen doping of polycrystalline 3C-SiC films grown by single-source chemical vapor deposition

Author： Wijesundara M.B.J.   Stoldt C.R.   Carraro C.   Howe R.T.   Maboudian R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.419, Iss.1, 2002-11, pp. : 69-75

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