Two-dimensional spatial profiles of plasma parameters in DC reactive magnetron sputtering of indium-tin-oxide

Author： Muta M. Ohgushi S. Matsuda Y. Fujiyama H.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 221-224

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