Quantitative characterization of the composition, thickness and orientation of thin films in the analytical electron microscope

Author： Williams D.B.   Watanabe M.   Papworth A.J.   Li J.C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.424, Iss.1, 2003-01, pp. : 50-55

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