Optical investigation of silicon nitride thin films deposited by r.f. magnetron sputtering

Author: Xu G.   Jin P.   Tazawa M.   Yoshimura K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.425, Iss.1, 2003-02, pp. : 196-202

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Abstract