Elaboration, characterization and dielectric properties study of amorphous alumina thin films deposited by r.f. magnetron sputtering

Author: Segda B.G.   Jacquet M.   Besse J.P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.62, Iss.1, 2001-05, pp. : 27-38

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Abstract