Composition, structure and optical properties of SiC buried layer formed by high dose carbon implantation into Si using metal vapor vacuum arc ion source

Author： Chen D.   Wong S.P.   Yang S.   Mo D.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.426, Iss.1, 2003-02, pp. : 1-7

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