Optical properties and chemical structure of ion implanted a-SiC:H

Author: Tsvetkova T.   Tzenov N.   Tzolov M.   Dimova-Malinovska D.   Adriaenssens G.J.   Pattyn H.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 749-753

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Abstract