On the development of texture during growth of magnetron-sputtered CrN

Author： Schell N.   Petersen J.H.   Bottiger J.   Mucklich A.   Chevallier J.   Andreasen K.P.   Eichhorn F.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.426, Iss.1, 2003-02, pp. : 100-110

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