In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide

Author： Zudans I.   Seliskar C.J.   Heineman W.R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.426, Iss.1, 2003-02, pp. : 238-245

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Indium tin oxide on copper phthalocyanine – an ellipsometry study

By  

PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol. 7, Iss. 2, 2010-02 ,pp. : 304-307

John Wiley & Sons Inc

Access to resources Recommend Favorite

Indium tin oxide (ITO) thin film gas sensor for detection of methanol at room temperature

By Patel N.G.   Patel P.D.   Vaishnav V.S.  

Sensors and Actuators B: Chemical, Vol. 96, Iss. 1, 2003-11 ,pp. : 180-189

Elsevier

Access to resources Recommend Favorite

Reactive ion etching of indium tin oxide by SiCl 4 -based plasmas-substrate temperature effect

By Kuo Y.  

Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 777-779

Elsevier

Access to resources Recommend Favorite

In situ measurements of ultrathin silicon oxide dissolution rates

By Chopra D.   Suni I.I.  

Thin Solid Films, Vol. 323, Iss. 1, 1998-06 ,pp. : 170-173

Elsevier

Access to resources Recommend Favorite

Electrical characterization of a thin film tin oxide sensor array for VOCs detection

By Gutierrez J.   Getino J.   Horrillo M.C.   Ares L.   Robla J.I.   Garca C.   Sayago I.  

Thin Solid Films, Vol. 317, Iss. 1, 1998-04 ,pp. : 429-431

Elsevier

Access to resources Recommend Favorite