Characterization of polycrystalline SiC layers grown by ECR-PECVD for micro-electro-mechanical systems

Author： Ricciardi C. Bennici E. Cocuzza M. Mandracci P. Bich D. Guglielmetti V. Barucca G.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 187-190

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