Pronounced crystallization of silicon layers deposited with high deposition rates at temperatures =<200 o C

Author: Leconte Y.   Marie P.   Portier X.   Lejeune M.   Rizk R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 252-258

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Abstract