Microcrystalline silicon for solar cells deposited at high rates by hot-wire CVD

Author： Iwaniczko E. Xu Y. Schropp R.E.I. Mahan A.H.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 212-215

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