Residual stress measurement in thin carbon films by Raman spectroscopy and nanoindentation

Author: Taylor C.A.   Wayne M.F.   Chiu W.K.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 190-200

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Abstract