Preparation and characterization of amorphous GaF 3 and GaF 3 -BaF 2 thin films by ECR microwave plasma-enhanced CVD

Author： Takahashi S.   Shojiya M.   Kawamoto Y.   Konishi A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 28-33

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