Stress in hydrogenated amorphous silicon determined by X-ray diffraction

Author: Harting M.   Woodford S.   Knoesen D.   Bucher R.   Britton D.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 153-156

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Abstract