Catalytic CVD growth and properties of a-C:H and a-C:N

Author: Nakayama H.   Takatsuji K.   Moriwaki S.   Murakami K.   Mizoguchi K.   Nakayama M.   Miura Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 309-312

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Abstract