a-C(:H) and a-CN x (:H) films deposited by magnetron sputtering and PACVD

Author: Nobili L.   Cavallotti P.L.   Coccia Lecis G.   De Ponti G.   Lenardi C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 359-362

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract