Polyimide-based organic thin films prepared by rf magnetron sputtering

Author： Kinbara A.   Hayashi T.   Wakahara K.   Kikuchi N.   Kusano E.   Nanto H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 274-276

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