Effect of substrate bias voltage on the purity of Cu films deposited by non-mass separated ion beam deposition

By Lim J.-W.   Mimura K.   Miyake K.   Yamashita M.   Isshiki M.  

Thin Solid Films, Vol. 434, Iss. 1, 2003-06 ,pp. : 30-33

Elsevier

Access to resources Recommend Favorite

Microstructural study of iron nitride thin films deposited by ion beam sputtering

By Gupta M.   Gupta A.   Chaudhari S.M.   Phase D.M.   Ganesan V.   Rama Rao M.V.   Shripathi T.   Dasannacharya B.A.  

Vacuum, Vol. 60, Iss. 4, 2001-03 ,pp. : 395-399

Elsevier

Access to resources Recommend Favorite

Microstructure and tribological characteristics of multilayer films deposited by ion-beam mixing

By Zhang W.   Zhang X.   Yang D.   Xue Q.  

Wear, Vol. 197, Iss. 1, 1996-09 ,pp. : 266-270

Elsevier

Access to resources Recommend Favorite

Effect of low energy oxygen ion beam on optical and electrical characteristics of dual ion beam sputtered SnO 2 thin films

By Chung J.-H.   Choe Y.-S.   Kim D.-S.  

Thin Solid Films, Vol. 349, Iss. 1, 1999-07 ,pp. : 126-129

Elsevier

Access to resources Recommend Favorite

Structures and properties of copper thin films prepared by ion beam assisted deposition

By Gotoh Y.   Yoshii H.   Amioka T.   Kameyama K.   Tsuji H.   Ishikawa J.  

Thin Solid Films, Vol. 288, Iss. 1, 1996-11 ,pp. : 300-308

Elsevier

Access to resources Recommend Favorite