Atomic layer deposition of W x N/TiN and WN x C y /TiN nanolaminates

Author: Elers K.-E.   Saanila V.   Li W.-M.   Soininen P.J.   Kostamo J.T.   Haukka S.   Juhanoja J.   Besling W.F.A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.434, Iss.1, 2003-06, pp. : 94-99

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Abstract