Behavior of hydride species on Si surface during methane plasma irradiation investigated by in-situ infrared spectroscopy

Author： Shinohara M.   Kuwano T.   Kimura Y.   Niwano M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 13-18

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