Study of oxidation process of titanium by oxygen-radical beam assisted evaporation using quartz crystal microbalance

Author: Yamada Y.   Uyama H.   Murata T.   Nozoye H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.437, Iss.1, 2003-08, pp. : 123-126

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