Excimer laser annealed poly-Si thin film transistor with self-aligned lightly doped drain structure

Author： Kim Y.-H.   Hwang C.-S.   Song Y.-H.   Chung C.-H.   Ko Y.-W.   Sohn C.-Y.   Kim B.-C.   Lee J.H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.440, Iss.1, 2003-09, pp. : 169-173

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